Parametric mode mixing in asymmetric doubly clamped beam resonators

被引:23
|
作者
Yamaguchi, Hiroshi [1 ]
Mahboob, Imran [1 ]
机构
[1] NTT Basic Res Labs, Atsugi, Kanagawa 2431098, Japan
来源
NEW JOURNAL OF PHYSICS | 2013年 / 15卷
关键词
CAVITY; AMPLIFICATION;
D O I
10.1088/1367-2630/15/1/015023
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A model for the microscopic mechanism of parametric mixing between different modes in a single doubly clamped beam resonator is presented. Sinusoidal tension modulation along the beam axis at the frequency difference between two oscillation modes mixes the modes. Although the mixing occurs only when both the modes have the same parity in a uniform beam structure, we show that the modulation can also mix modes with different parities by introducing the beam-shape and mass-load asymmetry. The dominant contribution comes from the mass-load nonuniformity, and the calculation results show good agreement with experiments.
引用
收藏
页数:16
相关论文
共 50 条
  • [1] Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators
    Zhang, Ya
    Yoshioka, Yuri
    Iimori, Mirai
    Qiu, Boqi
    Liu, Xin
    Hirakawa, Kazuhiko
    APPLIED PHYSICS LETTERS, 2021, 119 (16)
  • [2] Effect of beam deflection on the thermal responsivity of GaAs-based doubly clamped microelectromechanical beam resonators
    Qiu, Boqi
    Zhang, Ya
    Akahane, Kouichi
    Nagai, Naomi
    Hirakawa, Kazuhiko
    APPLIED PHYSICS LETTERS, 2020, 117 (20)
  • [3] 1:1 internal mode coupling strength in GaAs doubly-clamped MEMS beam resonators with linear and nonlinear oscillations
    Zhang, Ya
    Yoshioka, Yuri
    Morohashi, Isao
    Liu, Xin
    APPLIED PHYSICS EXPRESS, 2021, 14 (01)
  • [4] Strong coherent energy exchange induced by the bending-bending mode-coupling effect in doubly clamped MEMS beam resonators
    Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo
    153-8505, Japan
    不详
    184-8588, Japan
    不详
    153-8505, Japan
    Phys. Rev. Appl., 6
  • [5] Stiffening of higher modes in doubly-clamped beam resonators depending on ground state amplitude
    Putnik, Martin
    Cardanobile, Stefano
    Hoeppner, Christian
    Mehner, Jan
    2016 17TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2016,
  • [6] Nonlinear damping in doubly clamped beam resonators due to the attachment loss induced by the geometric nonlinearity
    Gusso, Andre
    JOURNAL OF SOUND AND VIBRATION, 2016, 372 : 255 - 265
  • [7] Fabrication and characterization of GaN nanowire doubly clamped resonators
    Maliakkal, Carina B.
    Mathew, John P.
    Hatui, Nirupam
    Rahman, A. Azizur
    Deshmukh, Mandar M.
    Bhattacharya, Arnab
    JOURNAL OF APPLIED PHYSICS, 2015, 118 (11)
  • [8] Analysis of the Chaotic Dynamics of MEMS/NEMS Doubly Clamped Beam Resonators with Two-Sided Electrodes
    Dantas, W. G.
    Gusso, A.
    INTERNATIONAL JOURNAL OF BIFURCATION AND CHAOS, 2018, 28 (10):
  • [9] CLAMPED BEAM PARAMETRIC-AMPLIFIER
    EISINGER, K
    MERCHANT, HC
    JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 1979, 46 (01): : 197 - 202
  • [10] Electronic Temperature Compensation of Clamped-Clamped Beam MEMS Resonators
    Zadeh, S. A. Gorji
    Saha, T.
    Allidina, K.
    Nabki, F.
    El-Gamal, M. N.
    53RD IEEE INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, 2010, : 1193 - 1196