Transport properties of thin SnO2aOE©Sb⟩ films grown by pulsed laser deposition

被引：3

作者：

Petukhov, I. A. ^{[1
]}

Parshina, L. S. ^{[2
]}

Zuev, D. A. ^{[2
]}

Lotin, A. A. ^{[2
]}

Novodvorsky, O. A. ^{[2
]}

Khramova, O. D. ^{[2
]}

Shatokhin, A. N. ^{[1
]}

Putilin, F. N. ^{[1
]}

Rumyantseva, M. N. ^{[1
]}

Kozlovskii, V. F. ^{[1
]}

Maslakov, K. I. ^{[1
]}

Ivanov, V. K. ^{[3
]}

Gaskov, A. M. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Chem, Moscow 119991, Russia

[2] Russian Acad Sci, Inst Laser & Informat Technol, Shatura 140700, Moscow Oblast, Russia

[3] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, Moscow 119991, Russia

来源：

INORGANIC MATERIALS | 2013年 / 49卷 / 11期

基金：

俄罗斯基础研究基金会;

关键词：

ITO; CONDUCTIVITY; SB;

D O I：

10.1134/S0020168513100099

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin SnO2 < Sb > films grown by pulsed laser deposition have been characterized by X-ray diffraction, optical spectroscopy, and scanning electron microscopy. The carrier mobility and concentration in the films have been determined as functions of target composition (0-8 at % Sb) using Hall effect measurements, and the resistivity of the films has been measured by a four-probe technique. The lowest resistivity (rho = 2 x 10(-3) Omega cm) and the highest transmission (a parts per thousand integral 85%) of the films in the spectral range 400-800 nm have been obtained at a target composition Sb/(Sn + Sb) = 2 at %. The observed variation in the resistivity of the films is determined by changes in carrier concentration to a greater extent than by changes in carrier mobility. X-ray photoelectron spectroscopy results demonstrate that the predominant charge state of the antimony in the films is Sb5+.

引用

页码：1123 / 1126

页数：4

共 50 条

[21] Optical properties of SnO2 thin films prepared by pulsed laser deposition technique
AbdulWahhab, Nihal A.
JOURNAL OF OPTICS-INDIA, 2020, 49 (01): : 41 - 47
[22] Optical properties of SnO2 thin films prepared by pulsed laser deposition technique
Nihal A. AbdulWahhab
Journal of Optics, 2020, 49 : 41 - 47
[23] InGaZnO thin films grown by pulsed laser deposition
Chen, Jiangbo
Wang, Li
Su, Xueqiong
VACUUM, 2012, 86 (09) : 1313 - 1317
[24] Zrc thin films grown by pulsed laser deposition
Craciun, V
Craciun, D
Howard, JM
Singh, RK
ADVANCED OPTICAL PROCESSING OF MATERIALS, 2003, 780 : 123 - 128
[25] Transparent conducting F-doped SnO2 thin films grown by pulsed laser deposition
Kim, H.
Auyeung, R. C. Y.
Pique, A.
THIN SOLID FILMS, 2008, 516 (15) : 5052 - 5056
[26] Effect of trivalent element doping on structural and optical properties of SnO2 thin films grown by pulsed laser deposition technique
Kim, Geun Woo
Sung, Chang Hoon
Anwar, M. S.
Seo, Yong Jun
Heo, Si Nae
Park, Keun Young
Song, Tae Kwon
Koo, Bon Heun
CURRENT APPLIED PHYSICS, 2012, 12 : S21 - S24
[27] Optical properties of alumina and zirconia thin films grown by pulsed laser deposition
Gottmann, J
Husmann, A
Klotzbucher, T
Kreutz, EW
SURFACE & COATINGS TECHNOLOGY, 1998, 100 (1-3): : 415 - 419
[28] Structural and morphological properties of thin ZnO films grown by pulsed laser deposition
Suchea, M.
Christoulakis, S.
Tibeica, C.
Katharakis, M.
Kornilios, N.
Efthimiopoulos, T.
Koudoumas, E.
APPLIED SURFACE SCIENCE, 2008, 254 (17) : 5475 - 5480
[29] Preparation and properties of IrO2 thin films grown by pulsed laser deposition technique
Gong Yansheng
Wang Chuanbin
Qiang, Shen
Zhang Lianmeng
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION, 2007, 22 (01): : 77 - 81
[30] Magnetic and structural properties of CoFeB thin films grown by pulsed laser deposition
Awana, Geet
Cox, Chris
Stuffins, Laura
Venkat, Guru
Morrison, Kelly
Zhou, Zhaoxia
Backes, Dirk
MATERIALS RESEARCH EXPRESS, 2020, 7 (10)

← 1 2 3 4 5 →