Silicon photonic micro-disk resonators for label-free biosensing

被引:133
作者
Grist, Samantha M. [1 ]
Schmidt, Shon A. [2 ]
Flueckiger, Jonas [1 ]
Donzella, Valentina [1 ]
Shi, Wei [1 ]
Fard, Sahba Talebi [1 ]
Kirk, James T. [2 ]
Ratner, Daniel M. [2 ]
Cheung, Karen C. [1 ]
Chrostowski, Lukas [1 ]
机构
[1] Univ British Columbia, Dept Elect & Comp Engn, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada
[2] Univ Washington, Dept Bioengn, Seattle, WA 98195 USA
基金
美国国家科学基金会;
关键词
REFRACTIVE-INDEX; PROTEIN-A; WAVE-GUIDE; RESONANCE SHIFTS; RING-RESONATOR; BINDING; STREPTAVIDIN; ROUGHNESS; COMPACT; ANTIGEN;
D O I
10.1364/OE.21.007994
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 mu m TE-mode and 10 mu m dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 3.3x10(4) and 1.6x10(4) for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples. (c) 2013 Optical Society of America
引用
收藏
页码:7994 / 8006
页数:13
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