W-Shaped Cantilevers for Scanning Force Microscopy

被引：3

作者：

Le Rouzic, Julian ^{[1
]}

Vairac, Pascal ^{[2
]}

Cavallier, Bruno ^{[2
]}

Cretin, Bernard ^{[2
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Mech Engn, London SW7 2AZ, England

[2] UTBM, Dept MN2S, FEMTO ST Inst, CNRS,UFC,ENSMM,UMR 6174, F-25044 Besancon, France

来源：

IEEE SENSORS JOURNAL | 2013年 / 13卷 / 04期

关键词：

Atomic force microscopy; micromechanical devices; sensor phenomena and characterization; QUARTZ TUNING FORK; MICRODEFORMATION MICROSCOPY; VIBRATION MODES; TIP; SENSITIVITY; SUSCEPTIBILITY; FRICTION; CONTACT;

D O I：

10.1109/JSEN.2012.2232784

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper deals with the tip tilt occurring in scanning force microscopy during contact. Tangential forces lead to affect the localization of the measurement and prevent the quantification of local contact stiffness. Both are crucial for an accurate mechanical characterization of materials with high spatial resolution. Specific W-shaped cantilevers, using a mechanical compensating mechanism, have been designed to keep the tip vertical and get around these problems. They have been simulated with finite-element softwares and validated experimentally on the scanning microdeformation microscope. The promising results show that the principle could be used in other types of scanning force microscopies.

引用

页码：1340 / 1346

页数：7

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