Fabrication and CO Sensing Properties of Mesostructured ZnO Gas Sensors

被引:43
作者
Liu, Chueh-Yang [1 ]
Chen, Chia-Fu [2 ]
Leu, Jih-Perng [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] MingDao Univ, Inst Mat & Syst Engn, ChangHua 52345, Taiwan
关键词
adsorption; carbon compounds; desorption; electron diffraction; electrophoresis; gas sensors; II-VI semiconductors; scanning electron microscopy; transmission electron microscopy; wide band gap semiconductors; X-ray diffraction; zinc compounds; GENERAL-SYNTHESIS; FILMS; OXIDES; SILICA;
D O I
10.1149/1.3021044
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
This study presents the synthesis of mesostructured ZnO using a template replication method and the fabrication of a carbon monoxide sensor using the synthesized ZnO using the dielectrophoresis process. The mesoporous carbon, CMK-3, was employed for the template and zinc nitrite was used as the precursor for synthesizing the ordered porous ZnO. The mesostructured ZnO was analyzed using X-ray diffraction (XRD) patterns, scanning electron microscopy, transmission electron microscopy, selected area electron diffraction, and N-2 adsorption-desorption isotherms. The XRD patterns indicated that the ZnO exhibited a highly ordered structure after the template was removed. The morphology of the ZnO was randomly oriented and the structure was polycrystalline. The surface area, pore volume, and pore size of the porous ZnO were 61.3 m(2) g(-1), 0.31 cm(3) g(-1), and 5.3 nm, respectively. When CO gas was injected, the optimum sensitivities at 250 degrees C were 12.1, 14.6, 18.4, 26.0, and 60% when the CO concentrations were 10, 20, 30, 50, and 70 ppm, respectively.
引用
收藏
页码:J16 / J19
页数:4
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