Fabrication of optical microresonators using proton beam writing

被引：11

作者：

Kumar, Vanga Sudheer ^{[1
]}

Turaga, Shuvan Prashant ^{[1
]}

Teo, Ee Jin ^{[2
]}

Bettiol, Andrew A. ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Phys, Ctr Ion Beam Applicat, Singapore 117542, Singapore

[2] Agcy Sci Technol & Res, Inst Mat Res & Engn, Singapore 117602, Singapore

来源：

MICROELECTRONIC ENGINEERING | 2013年 / 102卷

关键词：

Optical microresonator; Proton beam writing; Laser cavity; FDTD simulations; RESONATOR; COMPONENTS; FILTERS;

D O I：

10.1016/j.mee.2012.02.017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Proton beam writing is a high-resolution direct write lithographic technique capable of producing three dimensional, high aspect ratio structures with smooth and vertical sidewalls. In this work, the fabrication of high quality SU-8 optical microdisk resonator with a Q factor of 10(4) is demonstrated. Simulations carried out using finite difference time domain (FDTD) are in good agreement with experimental results. By introducing rhodamine B laser dye into a SU-8 resist spiral microdisk cavity lasing was achieved with threshold pump fluence of 127 mu J/mm(2) when pumped with a 532 nm pulsed Nd:YAG laser. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：33 / 35

页数：3

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