Continuum modeling of particle redeposition during ion-beam erosion Laterally two-dimensional case

被引:10
作者
Diddens, Christian [1 ]
Linz, Stefan J. [2 ]
机构
[1] Eindhoven Univ Technol, Dept Mech Engn, POB 513, NL-5600 MB Eindhoven, Netherlands
[2] Univ Munster, Inst Theoret Phys, D-48149 Munster, Germany
关键词
ANGULAR-DISTRIBUTION; PATTERN-FORMATION; SURFACES; GE; INSTABILITIES; MORPHOLOGY; GROWTH; ORDER; CHAOS; DOTS;
D O I
10.1140/epjb/e2015-60468-7
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We thoroughly investigate the impact of redeposition on the self-organized pattern formation during ion-beam erosion within the framework of a spatially two-dimensional continuum model. An analysis on prestructured patterns allows the extraction of general properties of this mechanism, the typical distribution of redepositing particles and approximations in terms of the surface height in particular. By combining the redeposition model with erosion models, we present detailed results about the impact of redeposition on spatio-temporal surface evolutions. It is shown that redeposition can play a decisive role for pattern formation under ion-beam erosion within an extended range in the parameter space.
引用
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页数:22
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共 66 条
[1]   Analysis of a solid-on-solid type block model for particle redeposition in ion-beam erosion processes under normal incidence [J].
Anspach, Nils ;
Linz, Stefan J. .
JOURNAL OF STATISTICAL MECHANICS-THEORY AND EXPERIMENT, 2012,
[2]   Modeling particle redeposition in ion-beam erosion processes under normal incidence [J].
Anspach, Nils ;
Linz, Stefan J. .
JOURNAL OF STATISTICAL MECHANICS-THEORY AND EXPERIMENT, 2010,
[3]   A MODEL FOR NONLINEAR SEISMIC-WAVES IN A MEDIUM WITH INSTABILITY [J].
BERESNEV, IA ;
NIKOLAEVSKIY, VN .
PHYSICA D, 1993, 66 (1-2) :1-6
[4]   A new class of time discretization schemes for the solution of nonlinear PDEs [J].
Beylkin, G ;
Keiser, JM ;
Vozovoi, L .
JOURNAL OF COMPUTATIONAL PHYSICS, 1998, 147 (02) :362-387
[5]   Amorphous solid foam structures on germanium by heavy ion irradiation [J].
Bischoff, L. ;
Pilz, W. ;
Schmidt, B. .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2011, 104 (04) :1153-1158
[6]   Self-organization of Ge nanopattern under erosion with heavy Bi monomer and cluster ions [J].
Bischoff, L. ;
Heinig, K. -H. ;
Schmidt, B. ;
Facsko, S. ;
Pilz, W. .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 :198-201
[7]   Temporal evolution of dot patterns during ion sputtering [J].
Bobek, T ;
Facsko, S ;
Kurz, H ;
Dekorsy, T ;
Xu, M ;
Teichert, C .
PHYSICAL REVIEW B, 2003, 68 (08)
[8]   Quantitative analysis of the order of Bi ion induced dot patterns on Ge [J].
Boettger, R. ;
Bischoff, L. ;
Facsko, S. ;
Schmidt, B. .
EPL, 2012, 98 (01)
[9]   From holes to sponge at irradiated Ge surfaces with increasing ion energy-an effect of defect kinetics? [J].
Boettger, Roman ;
Heinig, Karl-Heinz ;
Bischoff, Lothar ;
Liedke, Bartosz ;
Facsko, Stefan .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 113 (01) :53-59
[10]   Silicon nanodot formation and self-ordering under bombardment with heavy Bi3 ions [J].
Boettger, Roman ;
Heinig, Karl-Heinz ;
Bischoff, Lothar ;
Liedke, Bartosz ;
Huebner, Rene ;
Pilz, Wolfgang .
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2013, 7 (07) :501-505