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- [3] Real-time dielectric measurements during extrusion of filled polymers ANTEC 2000: SOCIETY OF PLASTICS ENGINEERS TECHNICAL PAPERS, CONFERENCE PROCEEDINGS, VOLS I-III, 2000, : 287 - 291
- [9] An advanced AFM sensor for high-aspect ratio pattern profile in-line measurement METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XX, PTS 1 AND 2, 2006, 6152