Design guidelines for the integration of Geiger-mode avalanche diodes in standard CMOS technologies

被引:5
作者
Vignetti, M. M. [1 ]
Calmon, F. [1 ]
Cellier, R. [1 ]
Pittet, P. [1 ]
Quiquerez, L. [1 ]
Savoy-Navarro, A. [2 ]
机构
[1] Univ Lyon, Inst Nanotechnol Lyon, Lyon, France
[2] Univ Paris Diderot, Lab AstroParticule & Cosmol, Paris, France
关键词
Avalanche diode; Premature edge breakdown; Dark count rate; Geiger-mode; PEB; Band-to-band tunneling; Guard-ring; Deep sub-micrometer technology;
D O I
10.1016/j.mejo.2015.07.002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The goal of this paper is to provide some useful design guidelines at the device level regarding the main challenges to be typically faced in the design and integration of Geiger-mode avalanche diodes in a standard CMOS process. Different techniques are found in literature in order to avoid premature edge breakdown with the aim of limiting the electric field at the edges to be weaker than in the multiplication region. In this article, the use of such techniques, the conditions where they can effectively work and above all their limitations are studied by means of TCAD simulations for various diode architectures. Additionally, the noise performance is discussed by focusing on the band-to-band tunneling and shallow trench isolation enhanced dark count rates. Geiger-mode bias techniques as well as a synthesis on the pros and cons of the various avalanche diode architectures are finally presented aiming at facilitating future design choices. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:900 / 910
页数:11
相关论文
共 16 条
  • [1] Betta G. Dalla, ADV PHOTODIODES
  • [2] Avalanche photodiodes and quenching circuits for single-photon detection
    Cova, S
    Ghioni, M
    Lacaita, A
    Samori, C
    Zappa, F
    [J]. APPLIED OPTICS, 1996, 35 (12): : 1956 - 1976
  • [3] Silicon avalanche pixel sensor for high precision tracking
    D'Ascenzo, N.
    Marrocchesi, P. S.
    Moon, C. S.
    Morsani, F.
    Ratti, L.
    Saveliev, V.
    Navarro, A. Savoy
    Xie, Q.
    [J]. JOURNAL OF INSTRUMENTATION, 2014, 9
  • [4] Finkelstein H., IEEE ELECT DEVICE LE, P27
  • [5] A low-noise single-photon detector implemented in a 130 nm CMOS imaging process
    Gersbach, Marek
    Richardson, Justin
    Mazaleyrat, Eric
    Hardillier, Stephane
    Niclass, Cristiano
    Henderson, Robert
    Grant, Lindsay
    Charbon, Edoardo
    [J]. SOLID-STATE ELECTRONICS, 2009, 53 (07) : 803 - 808
  • [6] A CMOS STI-Bound Single-Photon Avalanche Diode With 27-ps Timing Resolution and a Reduced Diffusion Tail
    Hsu, Mark J.
    Finkelstein, Hod
    Esener, Sadik C.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2009, 30 (06) : 641 - 643
  • [7] AVALANCHE INITIATION PROBABILITY OF AVALANCHE-DIODES ABOVE BREAKDOWN VOLTAGE
    MCINTYRE, RJ
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (07) : 637 - 641
  • [8] A single photon avalanche diode implemented in 130-nm CMOS technology
    Niclass, Cristiano
    Gersbach, Marek
    Henderson, Robert
    Grant, Lindsay
    Charbon, Edoardo
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2007, 13 (04) : 863 - 869
  • [9] Electrical characterization of Pb centers in (100)Si-SiO2 structures:: The influence of surface potential on passivation during post metallization anneal
    Ragnarsson, LÅ
    Lundgren, P
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (02) : 938 - 942
  • [10] Richardson J., US Patent, Patent No. [US8552482 B2, 8552482]