Integrated photonics put at full stretch: flexible and stretchable photonic devices enabled by optical and mechanical co-design

被引：0

作者：

Li, Lan ^{[1
]}

Lin, Hongtao ^{[1
]}

Qiao, Shutao ^{[2
]}

Huang, Yizhong ^{[1
,3
]}

Li, Junying ^{[1
,4
]}

Michon, Jerome ^{[1
]}

Alonso-Ramos, Carlos ^{[5
]}

Vivien, Laurent ^{[5
]}

Yadav, Anupama ^{[6
]}

Richardson, Kathleen ^{[6
]}

Lu, Nanshu ^{[2
]}

Gu, Tian ^{[1
]}

Hu, Juejun ^{[1
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] Univ Texas Austin, Dept Aerosp Engn & Engn Mech, Austin, TX 78712 USA

[3] Xiamen Univ, Dept Elect Engn, Xiamen, Peoples R China

[4] Chongqing Univ, Educ Minist China, Key Lab Optoelect Technol & Syst, Chongqing, Peoples R China

[5] Univ Paris Saclay, Univ Paris Sud, C2N Orsay, Ctr Nanosci & Nanotechnol,CNRS, Orsay, France

[6] Univ Cent Florida, Coll Opt & Photon, Orlando, FL 32816 USA

来源：

SMART PHOTONIC AND OPTOELECTRONIC INTEGRATED CIRCUITS XXI | 2019年 / 10922卷

基金：

美国国家科学基金会;

关键词：

Integrated optics devices; Optical resonators; Waveguides; Flexible photonics; HIGH-PERFORMANCE; WAVE-GUIDES; SILICON; FABRICATION; PLATFORM;

D O I：

10.1117/12.2505830

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present recent development on integrated flexible and stretchable photonic devices. Conventional photonic devices are fabricated on rigid semiconductor or dielectric substrates and are therefore inherently incompatible with soft biological tissues. Recently, we have developed a suite of active and passive photonic devices and systems integrated on plastic substrates which can be bent, twisted, and stretched without compromising their optical performance. Key innovations are monolithic multi-material integration and advanced micro-mechanical structures co-designed with photonic devices, which enables devices with extreme mechanical flexibility and excellent optical performance.

引用

页数：7

共 37 条

[1] High performance, waveguide integrated Ge photodetectors [J].