Design and fabrication of TES microcalorimeters for x-ray astrophysics in Japan

被引：3

作者：

Ezoe, Yuichiro ^{[1
]}

Yoshino, Tomotaka ^{[2
]}

Mukai, Kazuma ^{[2
]}

Yoshitake, Hiroshi ^{[2
]}

Akamatsu, Hiroki ^{[1
]}

Ishikawa, Kumi ^{[1
]}

Takano, Takayuki ^{[3
]}

Maeda, Ryutaro ^{[3
]}

Ishisaki, Yoshitaka ^{[1
]}

Yamasaki, Noriko Y. ^{[2
]}

Mitsuda, Kazuhisa ^{[2
]}

Ohashi, Takaya ^{[1
]}

机构：

[1] Tokyo Metropolitan Univ, Minami Osawa 1-1, Tokyo 1920397, Japan

[2] Japan Aerosp Explorat Agcy ISAS JAXA, Inst Space & Astronaut Sci, Sagamihara, Kanagawa 2298510, Japan

[3] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

HIGH ENERGY, OPTICAL, AND INFRARED DETECTORS FOR ASTRONOMY III | 2008年 / 7021卷

关键词：

X-ray astronomy; X-ray microcalorimeter; transition edge sensor;

D O I：

10.1117/12.788155

中图分类号：

P1 [天文学];

学科分类号：

0704 ;

摘要：

Our recent development of transition-edge sensor (TES) microcalorimeters for future X-ray astronomical missions such as DIOS is reported. In-house micromaching processes has been established aiming at prompt fabrication of TES devices. With a single-pixel TES microcalorimeter and an Au absorber, the energy resolution of 4.8 eV at 5.9 keV is achieved. 16 x 16 pixel arrays of TES microcalorimeters are successfully fabricated by using deep dry etching technique. The energy resolution is 11 eV and 26 eV with and without all Au absorber; respectively. The worse energy resolution than a single-pixel TES is due to large decrease of TES sensitivity and increase of transition temperature after etching. The reason for these phenomena is under investigation. In parallel, mushroom-type Au absorber structures are being tested. Furthermore, to precisely measure TES sensitivities and heart capacity, an experimental setup for impedance measurements is established.

引用

页数：9

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