Extremely high-density GaAs quantum dots grown by droplet epitaxy

被引:33
作者
Jo, M. [1 ]
Mano, T. [1 ]
Sakuma, Y. [1 ]
Sakoda, K. [1 ,2 ]
机构
[1] Natl Inst Mat Sci, Photon Mat Unit, Tsukuba, Ibaraki 3050047, Japan
[2] Univ Tsukuba, Grad Sch Pure & Appl Sci, Tsukuba, Ibaraki 3058577, Japan
基金
日本学术振兴会;
关键词
(311)A; LAYERS; SIZE;
D O I
10.1063/1.4721663
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the fabrication of extremely high-density GaAs quantum dots (QDs) by droplet epitaxy. We investigated the dependence of temperature and coverage on the dot density. As a result, an areal density of 7.3 x 10(11) cm(-2) was achieved at a growth temperature of 30 degrees C by controlling the amount of Ga. The QDs showed clear luminescence even when grown at a low temperature of 30 degrees C. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4721663]
引用
收藏
页数:3
相关论文
共 31 条
[1]   Observation of Ga droplet formation on (311)A and (511)A GaAs surfaces [J].
AbuWaar, Ziad Y. ;
Wang, Zhiming M. ;
Lee, Jihoon H. ;
Salamo, Gregory J. .
NANOTECHNOLOGY, 2006, 17 (16) :4037-4040
[2]   Highly packed InGaAs quantum dots on GaAs(311)B [J].
Akahane, K ;
Kawamura, T ;
Okino, K ;
Koyama, H ;
Lan, S ;
Okada, Y ;
Kawabe, M ;
Tosa, M .
APPLIED PHYSICS LETTERS, 1998, 73 (23) :3411-3413
[3]   Fabrication of ultra-high-density InAs quantum dots using the strain-compensation technique [J].
Akahane, Kouichi ;
Yamamoto, Naokatsu ;
Kawanishi, Tetsuya .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (02) :425-428
[4]   Highest density 1.3 μm InAs quantum dots covered with gradient composition InGaAs strain reduced layer grown with an As2 source using molecular beam epitaxy [J].
Amano, T ;
Sugaya, T ;
Komori, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (12-15) :L432-L434
[5]   Use of a GaAsSb buffer layer for the formation of small, uniform, and dense InAs quantum dots [J].
Ban, Keun-Yong ;
Bremner, Stephen P. ;
Liu, Guangming ;
Dahal, Som N. ;
Dippo, Patricia C. ;
Norman, Andrew G. ;
Honsberg, Christiana B. .
APPLIED PHYSICS LETTERS, 2010, 96 (18)
[6]   The present status of quantum dot lasers [J].
Grundmann, M .
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 1999, 5 (03) :167-184
[7]   Size determination of InAs quantum dots using magneto-tunnelling experiments [J].
Hapke-Wurst, I ;
Zeitler, U ;
Schumacher, HW ;
Haug, RJ ;
Pierz, K ;
Ahlers, FJ .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1999, 14 (11) :L41-L43
[8]   Droplet epitaxy of GaAs quantum dots on (001), vicinal (001), (110), and (311)A GaAs [J].
Heyn, Ch. ;
Stemmann, A. ;
Schramm, A. ;
Hansen, W. .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (07) :1825-1827
[9]   Regimes of GaAs quantum dot self-assembly by droplet epitaxy [J].
Heyn, Ch. ;
Stemmann, A. ;
Schramm, A. ;
Welsch, H. ;
Hansen, W. ;
Nemcsics, A. .
PHYSICAL REVIEW B, 2007, 76 (07)
[10]   Lasing in ultra-narrow emission from GaAs quantum dots coupled with a two-dimensional layer [J].
Jo, M. ;
Mano, T. ;
Sakoda, K. .
NANOTECHNOLOGY, 2011, 22 (33)