Thin functional films by combustion chemical vapour deposition (C-CVD)

被引：19

作者：

Struppert, Thomas ^{[1
]}

Heft, Andreas ^{[1
]}

Gruenler, Bernd ^{[1
]}

机构：

[1] INNOVENT eV, Dept Surface Engn, D-07745 Jena, Germany

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 12期

关键词：

Surface functionalization; Combustion CVD; Atmospheric pressure; Oxides; LAYERS;

D O I：

10.1016/j.tsf.2011.06.048

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The use of the atmospheric pressure C-CVD (combustion chemical vapour deposition) process for the deposition of thin functional layers on float glass and plastics is described. We will give an overview on the variety of materials that can be deposited and some examples, like SiO2, WOx and Ag, are presented in more detail with potential applications. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：4106 / 4109

页数：4

共 16 条

[1]

[Anonymous], JB OBERFLACHENTECHNI

[2] Atmospheric pressure chemical vapour deposition of thermochromic tungsten doped vanadium dioxide thin films for use in architectural glazing [J].

Blackman, Christopher S. ;

Piccirillo, C. ;

Binions, R. ;

Parkin, Ivan P. .

THIN SOLID FILMS, 2009, 517 (16) :4565-4570

[3] Chemical vapour deposition of coatings [J].

Choy, KL .

PROGRESS IN MATERIALS SCIENCE, 2003, 48 (02) :57-170

[4] Optimization of crystalline tungsten oxide nanoparticles for improved electrochromic applications [J].

Deshpande, R. ;

Lee, S.-H. ;

Mahan, A. H. ;

Parilla, P. A. ;

Jones, K. M. ;

Norman, A. G. ;

To, B. ;

Blackburn, J. L. ;

Mitra, S. ;

Dillon, A. C. .

SOLID STATE IONICS, 2007, 178 (13-14) :895-900

[5] Comparative study of gasochromic and electrochromic effect in thermally evaporated tungsten oxide thin films [J].

Gogova, D. ;

Thomas, L. -K. ;

Camin, B. .

THIN SOLID FILMS, 2009, 517 (11) :3326-3331

[6]

Hunt AT, 1999, SURFACE ENGINEERING: SCIENCE AND TECHNOLOGY I, P99

[7] A new adhesive technology for all-ceramics [J].

Janda, R ;

Roulet, JF ;

Wulf, M ;

Tiller, HJ .

DENTAL MATERIALS, 2003, 19 (06) :567-573

[8] Novel nanostructured electrodes for solid oxide fuel cells fabricated by combustion chemical vapor deposition (CVD) [J].

Liu, Y ;

Zha, SW ;

Liu, ML .

ADVANCED MATERIALS, 2004, 16 (03) :256-+

[9]

MUSIL R, 1989, KUNSTSTOFF METALL VE

[10] Chemical structure and morphology of ultrathin combustion CVD layers on zinc coated steel [J].

Schinkinger, B ;

Petzold, R ;

Tiller, HJ ;

Grundmeier, G .

APPLIED SURFACE SCIENCE, 2001, 179 (1-4) :79-87

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