Whispering-gallery mode composite sensors for on-chip dynamic temperature monitoring

被引：23

作者：

Frenkel, Matthew ^{[1
]}

Avellan, Marlon ^{[1
]}

Guo, Zhixiong ^{[1
]}

机构：

[1] Rutgers State Univ, Dept Mech & Aerosp Engn, Piscataway, NJ 08854 USA

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2013年 / 24卷 / 07期

基金：

美国国家科学基金会;

关键词：

optical sensor; temperature measurement; on-chip measurement; LABEL-FREE;

D O I：

10.1088/0957-0233/24/7/075103

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Whispering-gallery mode temperature microsensors have been demonstrated to have extremely high accuracy. Previous experiments have been limited to indirect sensor heating by externally heating the local environment. In this paper, we coated PDMS films directly onto an electrical resistive wire as sensors, allowing on-chip dynamic temperature measurement. The effects of sensor size are discussed and verified through an expansion of the current theory of WGM resonance shifts to include composite materials. Finally, the WGM sensor's measurements are compared to the same measurements recorded by a thermocouple, demonstrating the great advantages of WGM sensors for on-chip real temperature monitoring.

引用

页数：8

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