Self-Organized Origami Structures via Ion-Induced Plastic Strain

被引:77
作者
Chalapat, Khattiya [1 ]
Chekurov, Nikolai [2 ]
Jiang, Hua [3 ]
Li, Jian [1 ]
Parviz, Babak [4 ]
Paraoanu, G. S. [1 ]
机构
[1] Aalto Univ, OV Lounasmaa Lab, Espoo 00076, Finland
[2] Aalto Univ, Dept Micro & Nanosci, Espoo 00076, Finland
[3] Aalto Univ, Dept Appl Phys, Espoo 00076, Finland
[4] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA
基金
芬兰科学院;
关键词
self-organization; nanocrystalline metal; 3D assembly; reactive ion etching; focused ion beam; INDUCED STRESS; POLYCRYSTALLINE; IMPLANTATION; FILMS; NANOSTRUCTURES; RELAXATION; CRYSTAL; GROWTH; FLOW; FIB;
D O I
10.1002/adma.201202549
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Ion processing of the reactive surface of a free-standing polycrystalline metal film induces a flow of atoms into grain boundaries, resulting in plastic deformation. A thorough experimental and theoretical analysis of this process is presented, along with the demonstration of novel engineering concepts for precisely controlled 3D assembly at micro- and nanoscopic scales.
引用
收藏
页码:91 / 95
页数:5
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