Self-Organized Origami Structures via Ion-Induced Plastic Strain

被引：77

作者：

Chalapat, Khattiya ^{[1
]}

Chekurov, Nikolai ^{[2
]}

Jiang, Hua ^{[3
]}

Li, Jian ^{[1
]}

Parviz, Babak ^{[4
]}

Paraoanu, G. S. ^{[1
]}

机构：

[1] Aalto Univ, OV Lounasmaa Lab, Espoo 00076, Finland

[2] Aalto Univ, Dept Micro & Nanosci, Espoo 00076, Finland

[3] Aalto Univ, Dept Appl Phys, Espoo 00076, Finland

[4] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

来源：

ADVANCED MATERIALS | 2013年 / 25卷 / 01期

基金：

芬兰科学院;

关键词：

self-organization; nanocrystalline metal; 3D assembly; reactive ion etching; focused ion beam; INDUCED STRESS; POLYCRYSTALLINE; IMPLANTATION; FILMS; NANOSTRUCTURES; RELAXATION; CRYSTAL; GROWTH; FLOW; FIB;

D O I：

10.1002/adma.201202549

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Ion processing of the reactive surface of a free-standing polycrystalline metal film induces a flow of atoms into grain boundaries, resulting in plastic deformation. A thorough experimental and theoretical analysis of this process is presented, along with the demonstration of novel engineering concepts for precisely controlled 3D assembly at micro- and nanoscopic scales.

引用

页码：91 / 95

页数：5

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