共 18 条
[1]
ISHIZAKI N, 1982, P 2 INT S MOL BEAM E, P182
[4]
Kern Werner., 1993, HDB SEMICONDUCTOR WA
[5]
SI-BEAM RADIATION CLEANING IN MOLECULAR-BEAM EPITAXY
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1985, 24 (05)
:564-567
[6]
KINETICS OF HIGH-TEMPERATURE THERMAL-DECOMPOSITION OF SIO2 ON SI(100)
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1559-1562
[7]
A REVIEW OF THE GEOMETRICAL FUNDAMENTALS OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION WITH APPLICATION TO SILICON SURFACES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (05)
:3692-3700
[9]
DEFECT MICROCHEMISTRY IN SIO2/SI STRUCTURES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1990, 8 (03)
:1857-1863