High-depth-resolution Auger depth profiling atomic mixing

The ion-bombardment-induced defects and their effect on the capability of Auger depth profiling is reviewed and discussed. It is shown that by using low ion energy ( < 1 keV) and grazing angle of incidence ( > 80 degrees), the quasi-quantitative detection of layers with thickness of I nm can be acheived. We discuss the possible evaluation routines for Auger depth profiling. In a case study, we demonstrate the performance of a novel evaluation routine based on TRIM simulation. We show by the help of the case study that, by depth profiling specimen of known structure, we can deduce data concerning atomic mixing. The close connection between Auger depth profiling and ion milling is also discussed. (C) 1999 Elsevier Science Ltd. All rights reserved.