This work reports A1GaN-based deep ultraviolet light-emitting diode (DUV LED) possessing a specifically AlxGa1-xN/AlyGa1-xN/AlxGa1-xN (x > y) structured p-electron blocking layer (p-EBL) to achieve the high external quantum efficiency (EQE). The impact of the p-EBL with Al y Ga1-yN insertion layer at different positions and with different AlN compositions on the hole and electron injection is systematically investigated. Our results show that, for the DUV LED structure in this work, both electrons and holes can be most efficiently injected into the active region by keeping the Al-y Ga1-yN insertion layer near to the p-region. The AlN composition for the AlyGa1-yN insertion layer has also to be optimized for maximizing the carrier injection. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
机构:
Australian Natl Univ, Res Sch Phys, Australian Natl Fabricat Facil ACT Node, Canberra, ACT 2601, AustraliaAustralian Natl Univ, Res Sch Phys, Dept Elect Mat Engn, Canberra, ACT 2601, Australia
Lysevych, Mykhaylo
Tan, Hark Hoe
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Australian Natl Univ, Res Sch Phys, Dept Elect Mat Engn, Canberra, ACT 2601, Australia
Australian Natl Univ, Australian Res Council Ctr Excellence Transformat, Res Sch Phys, Canberra, ACT 2601, AustraliaAustralian Natl Univ, Res Sch Phys, Dept Elect Mat Engn, Canberra, ACT 2601, Australia
Tan, Hark Hoe
Jagadish, Chennupati
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Australian Natl Univ, Res Sch Phys, Dept Elect Mat Engn, Canberra, ACT 2601, Australia
Australian Natl Univ, Australian Res Council Ctr Excellence Transformat, Res Sch Phys, Canberra, ACT 2601, AustraliaAustralian Natl Univ, Res Sch Phys, Dept Elect Mat Engn, Canberra, ACT 2601, Australia
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South China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
He, Longfei
Zhao, Wei
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
Zhao, Wei
Zhang, Kang
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
Zhang, Kang
He, Chenguang
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
He, Chenguang
Wu, Hualong
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
Wu, Hualong
Liu, Xiaoyan
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
Liu, Xiaoyan
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Luo, Xingjun
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Li, Shuti
Chen, Zhitao
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Guangdong Acad Sci, Guangdong Inst Semicond Ind Technol, Guangzhou 510650, Guangdong, Peoples R ChinaSouth China Normal Univ, Inst Optoelect Mat & Technol, Guangdong Engn Res Ctr Optoelect Funct Mat & Devi, Guangzhou 510631, Guangdong, Peoples R China
机构:
Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Gao, Bo
Liu, Hongxia
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Liu, Hongxia
Fan, Jinbin
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Fan, Jinbin
Wang, Shulong
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China