Dependence of electrically induced strain on orientation and composition in Pb(ZrxTi1-x)O3 films

被引：1
|
作者：
Sumi, K [1 ]
Qiu, H [1 ]
Shimada, M [1 ]
Sakai, S [1 ]
Yazaki, S [1 ]
Murai, M [1 ]
Moriya, S [1 ]
Miyata, Y [1 ]
Nishiwaki, T [1 ]
机构：
[1] Seiko Epson Corp, IJA Dev Grp, Nagano 3990785, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 08期
关键词：
PZT; film; strain; permittivity; composition; orientation;
D O I：
10.1143/JJAP.38.4843
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of orientation and composition on electrically induced strain and relative permittivity of 600-nm-thick Pb(ZrxTi1-x)O-3 (PZT) films was investigated. High permittivity was obtained near the morphotropic phase boundary (MPB) composition, unaffected by orientation. For films with mixed textures of [111] and [100], the electrically induced strain was maximum near the MPB composition. While the electrically induced strain showed a tendency to increase with increasing Zr concentration x in the films with [111] preferred orientation, for the Pb(Zr0.65Ti0.35)O-3 film with [111] preferred orientation, an electrically induced strain of 0.54% was obtained under an electric field of 250 kV/cm.
引用
收藏
页码：4843 / 4846
页数：4
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