Dependence of electrically induced strain on orientation and composition in Pb(ZrxTi1-x)O3 films

被引：1

作者：

Sumi, K ^{[1
]}

Qiu, H ^{[1
]}

Shimada, M ^{[1
]}

Sakai, S ^{[1
]}

Yazaki, S ^{[1
]}

Murai, M ^{[1
]}

Moriya, S ^{[1
]}

Miyata, Y ^{[1
]}

Nishiwaki, T ^{[1
]}

机构：

[1] Seiko Epson Corp, IJA Dev Grp, Nagano 3990785, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 08期

关键词：

PZT; film; strain; permittivity; composition; orientation;

D O I：

10.1143/JJAP.38.4843

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of orientation and composition on electrically induced strain and relative permittivity of 600-nm-thick Pb(ZrxTi1-x)O-3 (PZT) films was investigated. High permittivity was obtained near the morphotropic phase boundary (MPB) composition, unaffected by orientation. For films with mixed textures of [111] and [100], the electrically induced strain was maximum near the MPB composition. While the electrically induced strain showed a tendency to increase with increasing Zr concentration x in the films with [111] preferred orientation, for the Pb(Zr0.65Ti0.35)O-3 film with [111] preferred orientation, an electrically induced strain of 0.54% was obtained under an electric field of 250 kV/cm.

引用

页码：4843 / 4846

页数：4

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