Hybrid Surface Acoustic Wave-Electrohydrodynamic Atomization (SAW-EHDA) For the Development of Functional Thin Films

被引：30

作者：

Choi, Kyung Hyun ^{[1
]}

Kim, Hyun Bum ^{[1
]}

Ali, Kamran ^{[1
]}

Sajid, Memoon ^{[1
]}

Siddiqui, Ghayas Uddin ^{[1
]}

Chang, Dong Eui ^{[2
]}

Kim, Hyung Chan ^{[3
]}

Ko, Jeong Beom ^{[4
]}

Dang, Hyun Woo ^{[4
]}

Doh, Yang Hoi ^{[4
]}

机构：

[1] Jeju Natl Univ, Dept Mechatron Engn, Jeju 690756, South Korea

[2] Univ Waterloo, Dept Appl Math, Waterloo, ON N2L 3G1, Canada

[3] Korea Inst Ind Technol, Seoul, South Korea

[4] Jeju Natl Univ, Dept Elect Engn, Jeju 690756, South Korea

来源：

SCIENTIFIC REPORTS | 2015年 / 5卷

基金：

新加坡国家研究基金会;

关键词：

ATOMIC LAYER DEPOSITION; TEMPERATURE; COMPOSITE; HUMIDITY;

D O I：

10.1038/srep15178

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Conventional surface acoustic wave - electrostatic deposition (SAW-ED) technology is struggling to compete with other thin film fabrication technologies because of its limitation in atomizing high density solutions or solutions with strong inter-particle bonding that requires very high frequency (100 MHz) and power. In this study, a hybrid surface acoustic wave - electrohydrodynamic atomization (SAW-EHDA) system has been introduced to overcome this problem by integrating EHDA with SAW to achieve the deposition of different types of conductive inks at lower frequency (19.8 MHZ) and power. Three materials, Poly [2-methoxy-5-(2-ethylhexyloxy)-1, 4-phenylenevinylene] (MEH-PPV), Zinc Oxide (ZnO), and Poly(3, 4-ethylenedioxythiophene): Polystyrene Sulfonate (PEDOT:PSS) have been successfully deposited as thin films through the hybrid SAW-EHDA. The films showed good morphological, chemical, electrical, and optical characteristics. To further evaluate the characteristics of deposited films, a humidity sensor was fabricated with active layer of PEDOT:PSS deposited using the SAW-EHDA system. The response of sensor was outstanding and much better when compared to similar sensors fabricated using other manufacturing techniques. The results of the device and the films' characteristics suggest that the hybrid SAW-EHDA technology has high potential to efficiently produce wide variety of thin films and thus predict its promising future in certain areas of printed electronics.

引用

页数：14

共 36 条

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