Accurate Characterization of Film on Substrate Transmitting Specimens by the Envelope Method

被引：0
作者：
Minkov, Dorian Asenov [1 ]
Gavrilov, Gavril Mihaylov [1 ]
Marquez, Emilio [2 ]
Ruano, Susana Maria Fernandez [3 ]
机构：
[1] Tech Univ Sofia, Coll Energy & Elect, Bul Bulgaria 31, Botevgrad 2140, Bulgaria
[2] Univ Cadiz, Fac Sci, Duque Najera 8, Cadiz 11071, Spain
[3] CIEMAT, Photovolta Solar Energy Unit, Ave Complutense 40, Madrid 28040, Spain
来源：
2016 XXV INTERNATIONAL SCIENTIFIC CONFERENCE ELECTRONICS (ET) | 2016年
关键词：
accurate optical characterization; thin film; envelope method; negative feedback; OPTICAL-CONSTANTS; BEHAVIOR;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Higher accuracy is accomplished in characterization of thin film on substrate light transmitting specimens by the envelope method. This is a result of more accurate determination of the film thickness variation, based on minimization of film thickness error metrics. Three chalcogenide thin film specimens are characterized, and is shown that their thickness error metrics are better than those for previous characterizations of the same specimens.
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页数：4
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