Epitaxially grown WOx nanorod probes for sub-100 nm multiple-scanning-probe measurement

被引：54
作者：
Kubo, O.
Shingaya, Y.
Nakaya, M.
Aono, M.
Nakayama, T.
机构：
[1] ICORP, Japan Sci & Technol Agcy, Kawaguchi, Saitama 3320012, Japan
[2] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
[3] Univ Tsukuba, Grad Sch Pure & Appl Sci, Tsukuba, Ibaraki 3058571, Japan
来源：
APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 25期
关键词：
D O I：
10.1063/1.2213954
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Tungsten suboxide (WOx) nanorods that are directly grown on electrochemically etched tungsten (W) tips are used as probes of a double-scanning-probe tunneling microscope. A WOx nanorod well acts as a scanning probe in tunneling microscopy and stable atomic-scale imaging is confirmed. For a contact nanoelectrode in measuring electrical properties of nanostructures, the WOx nanorod probe is coated with platinum. A series of resistance measurements of an erbium-disilicide nanowire as a function of interprobe distance down to 72 nm is realized. (c) 2006 American Institute of Physics.
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页数：3
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