Material study on reactively sputtered zinc oxide for thin film silicon solar cells

被引：95
作者：
Hüpkes, J
Rech, B
Calnan, S
Kluth, O
Zastrow, U
Siekmann, H
Wuttig, M
机构：
[1] Forschungszentrum Julich, Inst Photovoltaics, Julich, Germany
[2] Rhein Westfal TH Aachen, Dept Phys, Inst Phys New Mat, D-5100 Aachen, Germany
来源：
THIN SOLID FILMS | 2006年 / 502卷 / 1-2期
关键词：
etching; solar cells; sputtering; zinc oxide;
D O I：
10.1016/j.tsf.2005.07.298
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Aluminum doped zinc oxide (ZnO:Al, AZO) films were prepared by reactive mid frequency magnetron sputtering. We characterized the electrical and optical properties as well as the surface morphology obtained after wet chemical etching. The carrier mobility could be increased up to 42 cm(2)/Vs and the transmission between 400 and 1100 nm was enhanced by the reduction of aluminum content in the targets. The working point of the reactive sputtering process strongly influences the etching behavior and was used to optimize the light scattering properties of the ZnO:Al films after wet chemical etching. Finally, the texture-etched ZnO:Al films were successfully applied as substrates for silicon thin film solar cells. (c) 2005 Elsevier B.V All rights reserved.
引用
收藏
页码：286 / 291
页数：6
相关论文
共 14 条
  • [1] Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications
    Agashe, C
    Kluth, O
    Schöpe, G
    Siekmann, H
    Hüpkes, J
    Rech, B
    [J]. THIN SOLID FILMS, 2003, 442 (1-2) : 167 - 172
  • [2] TRANSPARENT CONDUCTORS - A STATUS REVIEW
    CHOPRA, KL
    MAJOR, S
    PANDYA, DK
    [J]. THIN SOLID FILMS, 1983, 102 (01) : 1 - 46
  • [3] Hüpkes J, 2003, MATER RES SOC SYMP P, V762, P405
  • [4] HUPKES J, IN PRESS SOL ENERGY
  • [5] Modified Thornton model for magnetron sputtered zinc oxide:: film structure and etching behaviour
    Kluth, O
    Schöpe, G
    Hüpkes, J
    Agashe, C
    Müller, J
    Rech, B
    [J]. THIN SOLID FILMS, 2003, 442 (1-2) : 80 - 85
  • [6] LOFFL A, 1997, P 14 EUR PHOT SOL EN, P2089
  • [7] Deposition of TCO films by reactive magnetron sputtering from metallic Zn:Al alloy targets
    May, C
    Menner, R
    Strümpfel, J
    Oertel, M
    Sprecher, B
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 169 : 512 - 516
  • [8] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    MINAMI, T
    SATO, H
    NANTO, H
    TAKATA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (10): : L781 - L784
  • [9] State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
    Müller, J
    Schöpe, G
    Kluth, O
    Rech, B
    Sittinger, V
    Szyszka, B
    Geyer, R
    Lechner, P
    Schade, H
    Ruske, M
    Dittmar, G
    Bochem, HP
    [J]. THIN SOLID FILMS, 2003, 442 (1-2) : 158 - 162
  • [10] Microcrystalline silicon for large area thin film solar cells
    Rech, B
    Roschek, T
    Repmann, T
    Müller, J
    Schmitz, R
    Appenzeller, W
    [J]. THIN SOLID FILMS, 2003, 427 (1-2) : 157 - 165
12