Interlaboratory comparison measurements of aspheres

被引：30

作者：

Schachtschneider, R. ^{[1
,2
]}

Fortmeier, I. ^{[2
]}

Stavridis, M. ^{[1
]}

Asfour, J. ^{[3
,9
]}

Berger, G. ^{[4
]}

Bergmann, R. B. ^{[5
,6
]}

Beutler, A. ^{[7
]}

Bluemel, T. ^{[8
]}

Klawitter, H. ^{[2
,9
]}

Kubo, K. ^{[10
]}

Liebl, J. ^{[11
]}

Loeffler, F. ^{[2
,9
]}

Meess, R. ^{[2
,9
]}

Pruss, C. ^{[12
]}

Ramm, D. ^{[13
]}

Sandner, M. ^{[5
,16
]}

Schneider, G. ^{[9
,14
]}

Wendel, M. ^{[4
]}

Widdershoven, I. ^{[15
]}

Schulz, M. ^{[2
]}

Elster, C. ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, Abbeestr 2-12, D-10587 Berlin, Germany

[2] Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany

[3] Dioptic GmbH, Bergstr 92A, D-69469 Weinheim, Germany

[4] AMETEK GmbH, Rudolf Diesel Str 16, D-64331 Weiterstadt, Germany

[5] BIAS GmbH, Klagenfurter Str 5, D-28359 Bremen, Germany

[6] Univ Bremen, MAPEX, Fac Phys & Elect Engn 01, D-28359 Bremen, Germany

[7] Mahr GmbH, Carl Mahr Str 1, D-37073 Gottingen, Germany

[8] Triopt Berlin GmbH, Schwarzschildstr 12, D-12489 Berlin, Germany

[9] CC UPOB eV, Bundesallee 100, D-38116 Braunschweig, Germany

[10] Panason Prod Engn Co Ltd, 2-7 Matsuba Cho, Kadoma, Osaka 5718502, Japan

[11] Fachhochschule Deggendorf, Hsch Angew Wissensch, Technol Campus 1, D-94244 Teisnach, Germany

[12] Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany

[13] Panason Automot & Ind Syst Europe GmbH, Robert Bosch Str 27-29, D-63225 Langen, Germany

[14] Schneider GmbH & Co KG, Biegenstr 8-12, D-35112 Fronhausen, Germany

[15] IBS Precis Engn, Esp 201, NL-5633 AD Eindhoven, Netherlands

[16] Mevisco GmbH & Co KG, Findorffstr 103, D-28215 Bremen, Germany

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2018年 / 29卷 / 05期

关键词：

metrology; aspheres; interlaboratory comparison; COMPUTER-GENERATED HOLOGRAMS; INTERFEROMETER; SURFACES;

D O I：

10.1088/1361-6501/aaae96

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The need for high-quality aspheres is rapidly growing, necessitating increased accuracy in their measurement. A reliable uncertainty assessment of asphere form measurement techniques is difficult due to their complexity. In order to explore the accuracy of current asphere form measurement techniques, an interlaboratory comparison was carried out in which four aspheres were measured by eight laboratories using tactile measurements, optical point measurements, and optical areal measurements. Altogether, 12 different devices were employed. The measurement results were analysed after subtracting the design topography and subsequently a best-fit sphere from the measurements. The surface reduced in this way was compared to a reference topography that was obtained by taking the pointwise median across the ensemble of reduced topographies on a 1000 x 1000 Cartesian grid. The deviations of the reduced topographies from the reference topography were analysed in terms of several characteristics including peak-to-valley and root-mean-square deviations. Root-mean-square deviations of the reduced topographies from the reference topographies were found to be on the order of some tens of nanometres up to 89 nm, with most of the deviations being smaller than 20 nm. Our results give an indication of the accuracy that can currently be expected in form measurements of aspheres.

引用

页数：13

共 37 条

[1] [Anonymous], 2016, QED
[2] [Anonymous], 2017, KOMPETENZZENTRUM ULT
[3] [Anonymous], 2015, MATLAB
[4] Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram[J]. Asfour, JM;Poleshchuk, AG. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2006(01)
[5] Calibration of a non-null test interferometer for the measurement of aspheres and free-form surfaces[J]. Baer, Goran;Schindler, Johannes;Pruss, Christof;Siepmann, Jens;Osten, Wolfgang. OPTICS EXPRESS, 2014(25)
[6] Fast and Flexible Non-Null Testing of Aspheres and Free-Form Surfaces with the Tilted-Wave-Interferometer[J]. Baer, Goran;Schindler, Johannes;Pruss, Christof;Siepmann, Jens;Osten, Wolfgang. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2014(04)
[7] Non-contact metrology of aspheric surfaces based on MWLI technology[J]. Berger, G.;Petter, J. OPTIFAB 2013, 2013
[8] Comparison of asphere measurements by tactile and optical metrological instruments[J]. Bergmans, R. H.;Nieuwenkamp, H. J.;Kok, G. J. P.;Blobel, G.;Nouira, H.;Kueng, A.;Baas, M.;Tevoert, M.;Baer, G.;Stuerwald, S. MEASUREMENT SCIENCE AND TECHNOLOGY, 2015(10)
[9] Beutler A, 2014, CLASSICAL OPTICS 201
[10] Metrology for the production process of aspheric lenses[J]. Beutler, Andreas. ADVANCED OPTICAL TECHNOLOGIES, 2016(03)

← 1 2 3 4 →