Aerosol assisted chemical vapour deposition of gas-sensitive nanomaterials

被引:25
作者
Ezahra Annanouch, Fatima [1 ]
Vallejos, Stella [2 ]
Stoycheva, Toni [3 ]
Blackman, Christopher [4 ]
Llobet, Eduard [1 ]
机构
[1] Univ Rovira & Virgili, Minos EMaS, E-43007 Tarragona, Spain
[2] CSIC, IMB CNM CSIC, Ctr Nacl Microelect, Barcelona 08193, Spain
[3] IMM CNR, Italian Lab MDM, Unita Agrate Brianza, I-20864 Agrate Brianza, MB, Italy
[4] UCL, Dept Chem, London WC1H 0AJ, England
关键词
Aerosol-assisted chemical vapour deposition; Metal oxides; Low-dimensional nanomaterials; Nanoneedles Gas sensors; THIN-FILMS; SENSORS; METAL; COATINGS; OXIDES; PRECURSORS; AACVD; CVD;
D O I
10.1016/j.tsf.2013.04.090
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The synthesis of functional low-dimensional metal oxides for gas sensing has been attracting widespread research interest in the last few years. Here we review the results obtained employing the aerosol assisted chemical vapour deposition method, which is a flexible, inexpensive and high-yield technique for growing both polycrystalline or single-crystalline metal oxides with remarkable gas sensing properties. We show how this technique is suitable for growing metal-decorated low-dimensional nanostructures directly on alumina or silicon-based transducers, which helps in bridging the gap currently existing between nanotechnology-based gas sensors and mass-market applications. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:703 / 709
页数:7
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