Modeling and Compensation of the Hysteretic Nonlinearity of Piezoelectric Actuators

Piezoelectric actuator (PEA) is one of the key component in micro/nano manipulation equipment. However, the inherent hysteresis significantly limits its motion accuracy. In this paper, a Prandtl-Ishlinskii (PI) based feedfinward and feedback compound control strategyy is designed to eliminate the hysteretic nonlinearity of PEA, and thus linearizing the input/output relationship. An inverse hysteresis model is directly identified and validated using the open loop characteristics of the PEA. The inverse hysteresis model is used as the feedibrward compensator. In order to further improve the performance of the PEA, a feedforward and feedback compound control strategy is also designed and tested. A PEA equipped with strain gauges is selected in the experimental investigation. Experimental results show that the hysteresis can be successfully compensated using only feedforward control, and better performance is achieved using the feedforward and feedback compound control.