An LC Wireless Microfluidic Sensor Based on Low Temperature Co-Fired Ceramic (LTCC) Technology

被引：30

作者：

Liang, Yongyuan ^{[1
,2
]}

Ma, Mingsheng ^{[1
]}

Zhang, Faqiang ^{[1
]}

Liu, Feng ^{[1
]}

Liu, Zhifu ^{[1
,2
]}

Wang, Dong ^{[1
,2
]}

Li, Yongxiang ^{[3
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

[3] RMIT Univ, Sch Engn, Melbourne, Vic 3001, Australia

来源：

SENSORS | 2019年 / 19卷 / 05期

关键词：

microfluidics; LTCC; wireless sensor; liquid sensing; INTEGRATION; BIOSENSOR; SYSTEM; CHIP;

D O I：

10.3390/s19051189

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This work reports a novel wireless microfluidic biosensor based on low temperature co-fired ceramic (LTCC) technology. The wireless biosensor consists of a planar spiral inductor and parallel plate capacitor (LC) resonant antenna, which integrates with microchannel bends in the LTCC substrate. The wireless response of the biosensor was associated to the changes of its resonant frequency due to the alteration in the permittivity of the liquid flow in the microchannel. The wireless sensing performance to different organic liquids with permittivity from 3 to 78.5 was presented. The measured results are in good agreement with the theoretical calculation. The wireless detection for the concentration of glucose in water solution was investigated, and an excellent linear response and repeatability were obtained. This kind of LC wireless microfluidic sensor is very promising in establishing wireless lab-on-a-chip for biomedical and chemical applications.

引用

页数：11

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