共 6 条
- [1] FUJII M, 1994, IEEE GAAS IC S, P51
- [2] E-BEAM DIRECT-WRITE IN A DRY-ETCHED RECESS GATE HEMT PROCESS FOR GAAS/ALGAAS CIRCUITS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (10): : 2317 - 2320
- [3] KISHINE K, 1995, IEEE S VLSI CIRC, P127
- [6] WILHELM M, 1994, ISSCC, P94