Measurement technologies for precision positioning

被引：502
作者：
Gao, W. [1 ]
Kim, S. W. [2 ]
Bosse, H. [3 ]
Haitjema, H. [4 ]
Chena, Y. L. [1 ]
Lu, X. D. [5 ]
Knapp, W. [6 ]
Weckenmann, A. [7 ]
Estler, W. T. [8 ]
Kunzmann, H. [3 ]
机构：
[1] Tohoku Univ, Sendai, Miyagi 980, Japan
[2] Korea Adv Inst Sci & Technol, Seoul, South Korea
[3] PTB, Braunschweig, Germany
[4] Mitutoyo Res Ctr Europe, Eindhoven, Netherlands
[5] Univ British Columbia, Vancouver, BC V5Z 1M9, Canada
[6] ETH, IWF, Zurich, Switzerland
[7] Univ Erlangen Nurnberg, Nurnberg, Germany
[8] NIST, Gaithersburg, MD 20899 USA
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2015年 / 64卷 / 02期
关键词：
Measurement; Positioning; Sensor; ABSOLUTE DISTANCE MEASUREMENT; UPDATED EDLEN EQUATION; REFRACTIVE-INDEX; MEASUREMENT-SYSTEM; SURFACE ENCODER; INTERFEROMETER SYSTEM; DISPLACEMENT SENSOR; MACHINE-TOOLS; MICRO-CMM; CALIBRATION;
D O I：
10.1016/j.cirp.2015.05.009
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Precision positioning of an object relative to a reference point is a common task in many activities of production engineering. Sensor technologies for single axis measurement, either linear or rotary, which form the fundamentals of measurement technologies for precision positioning, are reviewed. Multi-axis coordinate measurement methods such as triangulation and multilateration, as well as Cartesian and polar systems for specifying the position in a plane or three-dimensional (3D) space are then presented, followed by a discussion on traceability and standards. Some advanced applications of measurement technologies for precision positioning in manufacturing industries are also demonstrated. (C) 2015 CIRP.
引用
收藏
页码：773 / 796
页数：24
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