Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering

被引：0

作者：

Wang Xue-Jin ^{[1
]}

Liang Chun-Jun ^{[2
]}

Guan Kang-Ping ^{[2
]}

Li De-Hua ^{[3
]}

Nie Yu-Xin ^{[3
]}

Zhu Shi-Oiu ^{[1
]}

Huang Feng ^{[1
]}

Zhang Wei-Wei ^{[1
]}

Cheng Zheng-Wei ^{[2
]}

机构：

[1] China Agr Univ, Coll Sci, Beijing 100083, Peoples R China

[2] Beijing Jiaotong Univ, Sch Sci, Beijing 100044, Peoples R China

[3] China Agr Univ, Inst Phys, Lab Opt Phys, Beijing 100190, Peoples R China

来源：

CHINESE PHYSICS B | 2008年 / 17卷 / 09期

基金：

中国国家自然科学基金;

关键词：

surface oxidation; vanadium dioxide; films; magnetron sputtering;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes.

引用

页码：3512 / 3515

页数：4

共 16 条

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