The current status of surface wave plasma source development

被引：4

作者：

Dong Tai-Yuan ^{[1
]}

Ye Kun-Tao ^{[1
]}

Liu Wei-Qing ^{[1
]}

机构：

[1] Jiangxi Univ Sci & Technol, Sch Sci, Ganzhou 341000, Peoples R China

来源：

ACTA PHYSICA SINICA | 2012年 / 61卷 / 14期

关键词：

surface wave; plasma; surface plasmon polariton; discharging of the microwave; SLOT-ANTENNA; MICROWAVE PLASMA; NUMERICAL-SIMULATION; FIELD DISTRIBUTION; OPTICAL-EMISSION; RF PLASMA; PROPAGATION; DENSITY; DISCHARGE; EXCITATION;

D O I：

10.7498/aps.61.145202

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this paper, a flat-type surface wave plasma (SWP) source generated by microwave discharg is introduced systematically. The principle of the surface wave plasma is analyzed and the energy absorption mechanism of the surface wave plasma discharge is explored. A novel wave-mode converter composed of the single-mode resonator array, sub-wavelength diffraction grating and a new type of slot antenna array is introduced. The research findings, such as the mechanism of the generation, the realization, the characteristics of plasma parameters and the numerical simulation of the new SWP sources are beneficial to industrial applications, will promote the effectiveness of the microelectronics industry and obtain a new breakthrough.

引用

页数：7

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