Sol-gel materials in electronic

Sol-gel techniques are known since a long time and their specific advantages are coming from the possibility to formulate in liquid solution. In addition to oxide material, they give direct access to the class of hybrid materials using well-known deposition techniques in electronic industry like spin coating or dip coating to prepare materials in thin film form. These techniques are particularly adapted for the preparation of perovskite material, like PZT and other dielectric material particularly useful in microelectronic application like capacitor integration, non-volatile memory or low dielectric constant material. Relatively thick film, UV sensitive film and mesoporous films can be prepared by these techniques. Moreover sol-gel formulation prepared from hybrid precursors gives access to material with superior properties compared to those prepared by simple blending techniques.