PZT coated optical fibers for acousto-optical modulation

被引：0
|
作者：
Eitle, J [1 ]
Fox, GR [1 ]
Muralt, P [1 ]
Setter, N [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland
来源：
FERROELECTRICS | 1999年 / 223卷 / 1-4期
关键词：
PZT thin films; reactive sputtering; x-ray diffraction; dielectric constant; P(E) hysteresis;
D O I：
10.1080/00150199908260597
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Piezoelectric coatings of PbZrxTi1-xO3 (PZT) were deposited on standard telecommunication fibers. The PZT coatings were produced by reactive de magnetron sputtering of metal targets in pure oxygen atmosphere. The deposition was carried out at substrate temperatures between 500 and 600 degrees C. Film thicknesses are in the range of 1300 to 1500 nm. The device structure under investigation is of the Ti/Pt/PZT/Au type. X-ray diffraction (XRD) scanning electron microscopy (SEM), and electrical measurements were used to characterize the films. Results on crystalline phase formation, microstructure, and ferroelectric behavior of the axially symmetric coatings are presented.
引用
收藏
页码：413 / 420
页数：8
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