Shortwave projection nanolithography

被引：9
作者：
Salashchenko, N. N.
Chkhalo, N. I.
机构：
来源：
HERALD OF THE RUSSIAN ACADEMY OF SCIENCES | 2008年 / 78卷 / 03期
基金：
俄罗斯基础研究基金会;
关键词：
D O I：
10.1134/S1019331608030155
中图分类号：
N09 [自然科学史]; B [哲学、宗教];
学科分类号：
01 ; 0101 ; 010108 ; 060207 ; 060305 ; 0712 ;
摘要：
The article below is dedicated to research into nanolithography in the ultrashort spectral region that was conducted at the RAS Institute for Physics of Microstructures and discussed at an RAS Presidium meeting. These findings, according to the participants in the meeting, can actually be used to revive the Russian microelectronic industry.
引用
收藏
页码：279 / 285
页数：7
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