Physical Level Simulation of PolyMUMPs Based Monolithic Tri-Axis MEMS Capacitive Accelerometer Using FEM Technique

In this paper, we present the design verification of PolyMUMPs based monolithic tri-axis MEMS capacitive accelerometer. The physical level simulation has been done using the analyzer module of Coventorware to verify the performance of the three-axis accelerometer using Finite Element Method (FEM) and compared with the optimized results obtained in ANSYS and in MATLAB. The 2D model is created in the designer module of Coventorware. The 3D layout is generated in the preprocessor module and mesh is created on solid model. Proposed three axis accelerometer has three individual single axis accelerometers, integrated on a single substrate uniformly centered on single axis. Low mechanical noise, high sensitivity and sense capacitance have been measured for all axes individually and presented. The results obtained from both the analytical and finite element models are found to be in excellent agreement.