Fabrication and Characterization of Magnetostrictive Micro-cantilevers

被引：0

作者：

Singh, Jitendra ^{[1
]}

Kumar, Ramesh ^{[1
]}

Sinha, Aditi ^{[1
]}

Das, Surajit ^{[1
]}

Panwar, Deepak ^{[1
]}

Arout, Chelvane J. ^{[2
]}

机构：

[1] CSIR Cent Elect Engn Res Inst Pilani, Smart Sensors Area, Pilani 333031, Rajasthan, India

[2] Def Met Res Lab, Adv Magnet Lab, Hyderabad 500058, India

来源：

2018 IEEE SENSORS | 2018年

关键词：

cantilever; magnetic; MEMS; magnetostrictive; THIN-FILMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a magnetostrictive Fe65Co35 thin film based ro-cantilever using micro-fabrication process. The cantileverstack consists of Si/SiO2/Fe65Co35 layers for actuation nd cantilever thickness was controlled by silicon bulk micromachining process. High magnetostrictive and low stress Fe/Co 65/35 composition was utilized in cantilevers. Magnetic properties of Fe65Co35 films e investigated using vibrating sample magnetometer and laser Doppler vibrometer. Micro-cantilever dimensions were confirmed using scanning electron microscope. Magnetic actuation was performed by applied magnetic field of 2000 Oe and tip deflection was ionitored using laser interferometry method. In-house dc magnetic eld set-up was developed which is compatible to laser Doppler vibrometer, Using cantilever deflection method magnetostriction coefficient (lambda) was found to be similar to 135 ppm. The des,eloped rnagnetostrictive cantilever is very useful MagMEMS and low field sensing and actuation applications.

引用

页码：24 / 27

页数：4

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