Calculation of reflectometric characteristics taking into account profile inhomogeneity of the transition layer

被引：4

作者：

Shagaev, V. V. ^{[1
]}

机构：

[1] Bauman Moscow State Tech Univ, Kaluga Branch, Kaluga 248000, Russia

来源：

TECHNICAL PHYSICS | 2015年 / 60卷 / 12期

关键词：

Reflection Coefficient; Transition Layer; Versus Versus Versus Versus; Homogeneous Layer; Drude Model;

D O I：

10.1134/S1063784215120191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The influence of a transition layer with a small phase thickness on the results of reflectometric investigations is considered. The expressions for the reflection coefficients of electromagnetic waves with the p-wave and s-wave polarization are obtained using the perturbation theory. Logarithmic derivative of the reflection coefficient with respect to angle for a wave with the p-wave polarization is analyzed. It is shown that near the Brewster angle, the derivative has singularities associated with the electrodynamic parameters of the transition layer. The results of calculations for the diffusion layers are presented.

引用

页码：1738 / 1743

页数：6

共 5 条

[1] Babikov V.V., 1976, METHOD PHASE FUNCTIO
[2] Effect of the transition layer on ellipsometric measurement of nanodimensional layers
Bilenko, DI
Polyanskaya, VP
Getsman, MA
Gorin, DA
Neveshkin, AA
Yaschenok, AM
[J]. TECHNICAL PHYSICS, 2005, 50 (06) : 742 - 746
[3] Nanooptics of gradient dielectric films
Shvartsburg, A. B.
Agranat, M. B.
Chefonov, O. V.
[J]. QUANTUM ELECTRONICS, 2009, 39 (10) : 948 - 952
[4] Shvartsburg AB, 2000, USP FIZ NAUK+, V170, P1297, DOI 10.1070/PU2000v043n12ABEH000827
[5] On the Control of Thin Film Growth by Angular Reflectometry near the Brewster Angle
Zinchenko, S. P.
Kovtun, A. P.
Tolmachev, G. N.
[J]. TECHNICAL PHYSICS, 2009, 54 (11) : 1689 - 1694

← 1 →