5∼10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology

被引：0

作者：

Yamanouchi, K.

Satoh, Y.

Isano, H.

Kawasaki, D.

机构：

来源：

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XI | 2006年 / 6109卷

关键词：

surface acoustic wave; interdigital transducer; SAW resonator; ladder type filter; nano-technology; 5-10GHz low loss filter;

D O I：

10.1117/12.645639

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We show the SAW resonators and ladder type SAW resonator filters using high coupling SiO2/5 degrees Y-X LiNbO3 with Zero Temperature Coefficients of Frequency (TCF). The theoretical analysis of 5 similar to 10GHz ladder type filters including the propagation attenuations and resistive loss of interdigital transducers are shown. Finally the experimental results below 2.0dB insertion loss with a wide band and zero TCF at 5 similar to 10GHz-range are shown.

引用

页数：5

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