Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process

被引:401
作者
Kobayashi, Toshiyuki [1 ]
Bando, Masashi [1 ]
Kimura, Nozomi [1 ]
Shimizu, Keisuke [1 ]
Kadono, Koji [1 ]
Umezu, Nobuhiko [1 ]
Miyahara, Kazuhiko [1 ]
Hayazaki, Shinji [1 ]
Nagai, Sae [1 ]
Mizuguchi, Yukiko [1 ]
Murakami, Yosuke [1 ]
Hobara, Daisuke [1 ]
机构
[1] Sony Corp, Adv Mat Labs, Atsugi, Kanagawa 2430014, Japan
关键词
COPPER; GROWTH; CU;
D O I
10.1063/1.4776707
中图分类号
O59 [应用物理学];
学科分类号
摘要
A high-quality graphene transparent conductive film was fabricated by roll-to-roll chemical vapor deposition (CVD) synthesis on a suspended copper foil and subsequent transfer. While the high temperature required for the CVD synthesis of high-quality graphene has prevented efficient roll-to-roll production thus far, we used selective Joule heating of the copper foil to achieve this. Low pressure thermal CVD synthesis and a direct roll-to-roll transfer process using photocurable epoxy resin allowed us to fabricate a 100-m-long graphene transparent conductive film with a sheet resistance as low as 150 Omega/sq, which is comparable to that of state-of-the-art CVD-grown graphene films. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4776707]
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页数:4
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