Basic aspects and challenges of semiconductor gas sensors

被引：534
作者：
Shimizu, Y [1 ]
Egashira, M [1 ]
机构：
[1] Nagasaki Univ, Nagasaki 852, Japan
来源：
MRS BULLETIN | 1999年 / 24卷 / 06期
关键词：
D O I：
10.1557/S0883769400052465
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An account is given of the key factors that affect the sensing properties of semiconductor gas sensors. Topics discussed include the effects of grain size and the geometry of grain connections, promoting effects of noble metals, and effects of sensor configuration. New challenges in the field are also detailed.
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页码：18 / 24
页数：7
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