Effect of codeposition parameters on the hardness and adhesion of TiVN coatings

被引：18
|
作者：
Montero-Ocampo, C. [1 ]
Ramirez-Ceja, E. A. [1 ]
Hidalgo-Badillo, J. A. [1 ]
机构：
[1] CINVESTAV IPN, U Saltillo, Ind Met 1062, Ramos Arizpe 25900, Coahuila, Mexico
来源：
CERAMICS INTERNATIONAL | 2015年 / 41卷 / 09期
关键词：
Hardness; Adhesion; TiVN coating; TRIBOLOGICAL PROPERTIES; THIN-FILMS;
D O I：
10.1016/j.ceramint.2015.05.046
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A systematic study of the effect of PVD cathodic arc deposition parameters on TiVN coating performance was carried out to analyze the structure, surface morphology, chemical composition, hardness and adhesion of these coatings. The effects of four factors including operation pressure, substrate bias voltage, and the currents applied to the Ti target and to the V target were evaluated. The investigated coatings were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, adhesion tests (i.e., scratch tests) and Vickers microhardness tests. The results of this study showed that the current applied to the V target was the factor having the greatest effect on TiVN coating hardness, while the bias voltage applied to the substrate had the greatest effect on adhesion strength. The obtained TiVN coatings were shown to have good hardness values near 15 GPa and high adhesion critical loads near 113 N. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
引用
收藏
页码：11013 / 11023
页数：11
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