Thermo-hygro-mechanical design and reliability analysis for CMOS Image Sensor

被引:9
作者
Hsu, Hsiang-Chen [1 ]
Lee, Hui-Yu [1 ]
Hsu, Yu-Cha [1 ]
Fu, Shen-Li [2 ]
机构
[1] I Shou Univ, Dept Mech & Automat Engn, Kangshan 84008, Kaohsiung Cty, Taiwan
[2] I Shou Univ, Dept Elect Engn, Kangshan 84008, Kaohsiung Cty, Taiwan
关键词
CMOS Image Sensor; coefficient of moisture expansion; hygroscopic swell;
D O I
10.1080/01495730802194532
中图分类号
O414.1 [热力学];
学科分类号
摘要
In this paper, the characteristics of polymeric packaging materials for Pre-mold QFN type CMOS Image Sensor (CIS) have been carefully investigated. Hygro-mechanical property, the coefficient of moisture expansion (CME) for different materials was measured through Thermal Mechanical Analysis (TMA) and Thermal Gravitational analysis (TGA) at given humidity and temperature. Moisture absorption/desorption diffusivity were determined under Arrhenius behavior. The transient moisture diffusion analysis described by Fick's equation is performed to evaluate the overall moisture distribution. In accordance with the JEDEC pre-conditioning standard JESD22-A120, reliability and thermal design were carried out due to mismatch of the coefficient of thermal expansion (CTE) and CME for multi-material package of CIS. A three-dimensional solid model of CIS based on finite element ANSYS software is developed to predict the thermal-induced strain, hygroscopic swelling deformation and the residual thermo-hygro-mechanical stress distributions. A series of comprehensive parametric studies were conducted in this research.
引用
收藏
页码:917 / 934
页数:18
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