Rapid thermal processing of self-assembling block copolymer thin films

被引:68
|
作者
Ferrarese Lupi, F. [1 ]
Giammaria, T. J. [1 ,2 ]
Ceresoli, M. [1 ,3 ]
Seguini, G. [1 ]
Sparnacci, K. [2 ]
Antonioli, D. [2 ]
Gianotti, V. [2 ]
Laus, M. [2 ]
Perego, M. [1 ]
机构
[1] IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy
[2] Univ Piemonte Orientale Amedeo Avogadro, Dipartimento Sci & Innovaz Tecnol DISIT, UdR Alessandria, INSTM, I-15121 Alessandria, Italy
[3] Univ Milan, Dipartimento Fis, I-20133 Milan, Italy
关键词
LITHOGRAPHY; PATTERNS; ORIENTATION; ELECTRONICS; MORPHOLOGY; DENSITY; ARRAYS;
D O I
10.1088/0957-4484/24/31/315601
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Self-assembling block copolymers generate nanostructured patterns which are useful for a wide range of applications. In this paper we demonstrate the capability to control the morphology of the self-assembling process of PS-b-PMMA diblock copolymer thin films on unpatterned surfaces by means of fast thermal treatment performed in a rapid thermal processing machine. The methodology involves the use of radiation sources in order to rapidly drive the polymeric film above the glass transition temperature. Highly ordered patterns were obtained for perpendicular-oriented cylindrical and lamellar PS-b-PMMA block copolymers in less than 60 s. This approach offers the unprecedented opportunity to investigate in detail the kinetics of the block copolymer self-assembly during the early stages of the process, providing a much deeper understanding of the chemical and physical phenomena governing these processes.
引用
收藏
页数:7
相关论文
共 50 条
  • [41] Self-assembling block copolymer systems involving competing length scales: A route toward responsive materials
    Nap, R
    Erukhimovich, I
    ten Brinke, G
    MACROMOLECULES, 2004, 37 (11) : 4296 - 4303
  • [42] Self-assembling resists based on block copolymers.
    Nealey, PF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U472 - U472
  • [43] Self-assembling amphiphilic block-co-polymers.
    Cavalli, S
    Overhand, M
    Fraaije, JGEM
    Kros, A
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 225 : U696 - U696
  • [44] Rapid self-assembly in ternary "wet brush" block copolymer/homopolymer blend thin films
    Doerk, Gregory
    Li, Ruipeng
    Fukuto, Masafumi
    Toth, Kristof
    Rodriguez, Alfredo
    Osuji, Chinedum
    Yager, Kevin
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2019, 257
  • [45] Morphology and thermal behavior of self-assembling carbamates
    Moniruzzaman, M
    Goodbrand, B
    Sundararajan, PR
    JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (33): : 8416 - 8423
  • [46] Unconventional processing for defects control in block-copolymer thin films
    Karim, Alamgir
    Kim, Sangcheol
    Berry, Brian
    Briber, Robert M.
    Kim, Ho-Cheol
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 233
  • [47] Laser processing of polyethylene glycol derivative and block copolymer thin films
    Cristescu, R.
    Popescu, C.
    Popescu, A. C.
    Grigorescu, S.
    Duta, L.
    Mihailescu, I. N.
    Andronie, A.
    Stamatin, I.
    Ionescu, O. S.
    Mihaiescu, D.
    Buruiana, T.
    Chrisey, D. B.
    APPLIED SURFACE SCIENCE, 2009, 255 (10) : 5605 - 5610
  • [48] Tuning frictional properties of molecularly thin erucamide films through controlled self-assembling
    Youyu Di
    Shuai Zhang
    Xi-Qiao Feng
    Qunyang Li
    Acta Mechanica Sinica, 2021, 37 : 1041 - 1049
  • [49] Self-assembling growth of (Ba,Sr)TiO3 epitaxial thin films
    Li, YR
    Li, JL
    Zhang, Y
    Deng, XW
    Liu, XZ
    Tao, BW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (04): : 1935 - 1939
  • [50] Evolving reaction-diffusion ecosystems with self-assembling structures in thin films.
    Breyer, J
    Ackermann, J
    McCaskill, J
    ARTIFICIAL LIFE VI, 1998, : 28 - 34