Rapid thermal processing of self-assembling block copolymer thin films

被引:68
|
作者
Ferrarese Lupi, F. [1 ]
Giammaria, T. J. [1 ,2 ]
Ceresoli, M. [1 ,3 ]
Seguini, G. [1 ]
Sparnacci, K. [2 ]
Antonioli, D. [2 ]
Gianotti, V. [2 ]
Laus, M. [2 ]
Perego, M. [1 ]
机构
[1] IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy
[2] Univ Piemonte Orientale Amedeo Avogadro, Dipartimento Sci & Innovaz Tecnol DISIT, UdR Alessandria, INSTM, I-15121 Alessandria, Italy
[3] Univ Milan, Dipartimento Fis, I-20133 Milan, Italy
关键词
LITHOGRAPHY; PATTERNS; ORIENTATION; ELECTRONICS; MORPHOLOGY; DENSITY; ARRAYS;
D O I
10.1088/0957-4484/24/31/315601
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Self-assembling block copolymers generate nanostructured patterns which are useful for a wide range of applications. In this paper we demonstrate the capability to control the morphology of the self-assembling process of PS-b-PMMA diblock copolymer thin films on unpatterned surfaces by means of fast thermal treatment performed in a rapid thermal processing machine. The methodology involves the use of radiation sources in order to rapidly drive the polymeric film above the glass transition temperature. Highly ordered patterns were obtained for perpendicular-oriented cylindrical and lamellar PS-b-PMMA block copolymers in less than 60 s. This approach offers the unprecedented opportunity to investigate in detail the kinetics of the block copolymer self-assembly during the early stages of the process, providing a much deeper understanding of the chemical and physical phenomena governing these processes.
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页数:7
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