共 50 条
- [22] Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives NANOFABRICATION, 2014, 1 (01): : 35 - 52
- [28] Developments in focused ion beam metrology PROCESS, EQUIPMENT, AND MATERIALS CONTROL IN INTEGRATED CIRCUIT MANUFACTURING IV, 1998, 3507 : 216 - 224