The marching velocity of the capillary meniscus in a microchannel

被引:122
作者
Yang, LJ
Yao, TJ
Tai, YC
机构
[1] Tamkang Univ, Dept Mech & Electro Mech Engn, Tamsui 25137, Taiwan
[2] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA
关键词
D O I
10.1088/0960-1317/14/2/008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we describe an experimental method and an analytical model for characterizing the surface energy inside a microchannel of micrometer size by measuring the marching velocity or position of a capillary meniscus. This method is based on the fact that the force summation of the meniscus surface tension and the filling reservoir gravitation might produce a pressure to pull liquid into the channel, and the marching velocity or the instantaneous position of the meniscus is related to the surface energy. Both parylene and silicon-nitride microchannels with different surface conditions were fabricated to perform the fill-in experiments subject to different liquids. It is shown that our model agrees well with the experimental data and is a valid method.
引用
收藏
页码:220 / 225
页数:6
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