Thermo-mechanical effect on nanostructure formation using atomic force microscopy

被引:0
作者
Hsu, JR
Hsiao, CC
Sung, CK
Hsu, CL
机构
[1] Chung Shan Inst Sci & Technol, Taoyuan 32599, Taiwan
[2] Natl Tzing Hua Univ, Dept Power Mech Engn, Hsinchu 30013, Taiwan
来源
PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005, PT 1 AND 2 | 2006年 / 505-507卷
关键词
nanostructure; molecular dynamics simulation; adhesion; thermo-mechanical effect; atomic force microscopy;
D O I
10.4028/www.scientific.net/MSF.505-507.151
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Molecular dynamics (MID) simulation and the experiment of adhesion force measurement were introduced to study the nanostructure formation process in the atomic force microscopy. The atomic level process of the nanostructure formation and the thermo-mechanical effect caused by the factors of the contact area, the adhesion force, and the temperature were clearly shown and discussed. The size of the forming nanostructures was found to be positively related to the contact area and temperature, but the adhesion force would decrease as the temperature increase. In the case of higher temperature with smaller adhesion force, however, the larger-size nanostructure could still be made.
引用
收藏
页码:151 / 156
页数:6
相关论文
共 19 条
  • [1] *ADV STOR TECHN GR, 2003, NAN BAS APPR DAT STO
  • [2] [Anonymous], 1992, INTERMOLECULAR SURFA
  • [3] INFLUENCE OF HIGH-TEMPERATURES ON PARTICLE ADHESION
    BERBNER, S
    LOFFLER, F
    [J]. POWDER TECHNOLOGY, 1994, 78 (03) : 273 - 280
  • [4] BHUSHAN B, 1995, HDB MICRO NANO TRIBO
  • [5] Simulation of keV clusters incident on gold targets
    Childs, AM
    Shapiro, MH
    Tombrello, TA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 143 (03) : 298 - 305
  • [6] Dedkov GV, 2000, PHYS STATUS SOLIDI A, V179, P3, DOI 10.1002/1521-396X(200005)179:1<3::AID-PSSA3>3.0.CO
  • [7] 2-M
  • [8] Force interactions and adhesion of gold contacts using a combined atomic force microscope and transmission electron microscope
    Erts, D
    Lohmus, A
    Lohmus, R
    Olin, H
    Pokropivny, AV
    Ryen, L
    Svensson, K
    [J]. APPLIED SURFACE SCIENCE, 2002, 188 (3-4) : 460 - 466
  • [9] Molecular dynamics simulation of nano-lithography process using atomic force microscopy
    Fang, TH
    Weng, CI
    Chang, JG
    [J]. SURFACE SCIENCE, 2002, 501 (1-2) : 138 - 147
  • [10] Fabrication of gold nanostructures on a vicinal Si(111) 7x7 surface using ultrahigh vacuum scanning tunneling microscope and a gold-coated tungsten tip
    Fujita, D
    Jiang, QD
    Nejoh, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3413 - 3419