Chemical inertness of Cr-W-N coatings in glass molding

被引:26
作者
Chen, Yung-I [1 ]
Cheng, Yu-Ru [1 ]
Chang, Li-Chun [2 ,3 ]
Lee, Jyh-Wei [2 ,3 ]
机构
[1] Natl Taiwan Ocean Univ, Inst Mat Engn, Keelung 20224, Taiwan
[2] Ming Chi Univ Technol, Dept Mat Engn, New Taipei City 24301, Taiwan
[3] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, New Taipei City 24301, Taiwan
关键词
Annealing; Glass molding; Mechanical properties; Oxidation; Cr-W-N; HARD COATINGS; MECHANICAL-PROPERTIES; TRIBOLOGICAL PROPERTIES; MULTILAYER COATINGS; THERMAL-STABILITY; THIN-FILMS; PHASE; NANOINDENTATION; MICROSTRUCTURE; DIFFUSION;
D O I
10.1016/j.tsf.2015.09.044
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cr-W-N coatings with a Cr interlayer were prepared using reactive direct-current magnetron cosputtering on Si and cemented carbide substrates. To investigate the chemical inertness of Cr-W-N coatings against commercial moldable SiO2-B2O3-BaO-based glass in glass molding, thermal cycle annealing at 270 degrees C and 600 degrees C was performed in a quartz tube furnace in a 15-ppm O-2-N-2 atmosphere. Variations in the crystalline structure, mechanical properties, and surface roughness after various annealing durations were investigated. The results indicated that Cr37W31N32 and Cr24W46N30 coatings maintained a face-centered cubic phase and exhibited superior mechanical properties and low surface roughness after up to 1000 thermal cycles; these properties were attributed to the formation of amorphous oxide scales. By contrast, Cr8W69N23 and Cr4W82N14 coatings with a nanocrystalline W phase in the as-deposited state formed WO3 oxide scales after annealing, which negatively affected their mechanical properties and raised surface roughness values. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:102 / 109
页数:8
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